Fraunhofer IISB (Integrated Systems and Device Technology) nke dị na Erlangen na onye na-emepụta sistemu plasma nke dị na microwave na redio nke dị na Wettenberg bụ PVA TePla AG na-ejikọta ahụmịhe ha na Joint Lab maka mmepụta kristal aluminum nitride (AlN).
Dịka mba Europe mbụ, mmekorita a na-eme ka mmepụta obere ihe ndị e ji AlN monocrystalline mee nke nwere dayameta nke sentimita abụọ maka ebumnuche nyocha na mmepe. Nke a na-eme ka ohere AlN dị na Europe ka mma nke ukwuu, nke na-eme ka mmepe nke ngwaọrụ na sistemụ dabere na AlN na mgbanwe ha gaa na ngwa ụlọ ọrụ mmepụta ihe dịkwuo ngwa ngwa.
Aluminom nitride bụ otu n'ime ihe ndị kacha mma maka ọgbọ ọzọ nke ngwa eletrọniki dị elu. Dịka semiconductor ultrawide-bandgap (UWBG), AlN na-emepe ohere ọhụrụ na photonics, ngwa eletrọniki ike, ngwa eletrọniki ugboro ugboro, na ngwa eletrọniki na-arụ ọrụ n'okpuru ọnọdụ dị oke njọ. Ruo taa, ụkọ nke ihe ndị AlN substrates dị elu, buru ibu na ọnụ ahịa adịghị mma anọgidewo na-egbochi mmepe nke sistemụ eletrọniki dabere na AlN.
"Site na Joint Lab, anyị na-etinye ntọala iji hụ na e nwere ike inye AlN substrates a pụrụ ịdabere na ya site na Europe, si otú a na-emepe ohere ọhụrụ maka ọgbọ ọzọ nke ngwaọrụ AlN dị elu," ka Dr Sven Besendörfer, onye ndu otu maka ihe nitride na onye na-ahụ maka mmepe ihe AlN na Fraunhofer IISB kwuru. "Anyị na PVA TePla na-enye aka na ahụmịhe anyị na uto kristal ụlọ ọrụ mmepụta ihe, si otú a na-emepụta ihe ndị dị mkpa maka mbufe na ngwa simenti."
Teknụzụ akụrụngwa egosipụtara na-ezute ihe ọmụma usoro nkeonwe
N'ime ụlọ nyocha nkwonkwo, Fraunhofer IISB na-eji teknụzụ usoro PVT (anụ ahụ na-ebugharị) nke ya iji mepụta kristal AlN buru ibu nke inch abụọ. N'ime usoro a, a na-ekupụ ntụ AlN n'ime ihe mkpuchi ọkụ na okpomọkụ karịrị 2000°C ma tinye ya na kristal mkpụrụ. PVA TePla na-enye sistemụ PVT maka ebumnuche a, nke ejirila n'ụwa niile maka kristal silicon carbide (SiC) nke inch asatọ ma ugbu a, a na-emegharị ya nke ọma maka uto nke kristal AlN nke inch abụọ.
N'ihi ahụmịhe usoro nke Fraunhofer IISB nyere, ndị otu PVA TePla nwere ike imepụta kristal AlN nke dị mma yiri ya ngwa ngwa n'ụlọ ọrụ nke ha. Ụlọ nyocha Joint na-elekwasị anya na mmepụta obere ogbe kwụsiri ike nke kristal AlN 2-inch. A na-eme ka mmepụta dịkwuo elu nwayọ nwayọ iji melite nkwụsi ike usoro, mmepụta mmegharị, mmepụta na nhazi ọnụ ahịa n'ụzọ dị mfe.
"Site na aluminom nitride, anyị na-akpụzi ọgbọ teknụzụ na-esote na-esochi SiC," ka Dr Jan Pfeiffer, osote onyeisi oche nke R&D na PVA TePla kwuru. "Site na Joint Lab, anyị nwere ike ijikọta ahụmịhe akụrụngwa anyị na ihe ọmụma usoro nke Fraunhofer IISB ozugbo, na-enye anyị ohere inye ndị ahịa anyị zuru ụwa ọnụ ngwọta ahịa na mbido," ka o kwukwara. "Ebumnuche anyị jikọrọ ọnụ bụ ịkwalite mmepe ahịa na ngalaba AlN site na ihe ndị kwesịrị ekwesị na ịkwado ụlọ ọrụ na-achọ ịbanye n'ọhịa a dị ka ndị mmekọ teknụzụ nwere akụrụngwa kwesịrị ekwesị na ahụmịhe usoro kwekọrọ."
Ime ka ikike teknụzụ nke Europe sikwuo ike site na nhazi ụlọ ọrụ mmepụta ihe
A na-ahazi kristal AlN ndị a na-emepụta na Joint Lab na Fraunhofer IISB ka ha bụrụ ihe ndị dị njikere na AlN, site na ụlọ ọrụ nyocha na mmepe ngwaahịa nke dị na Erlangen bụ LZE GmbH, kpọmkwem na mmepe ụlọ ọrụ mmepụta ihe na usoro nhazi. "Maka ikike semiconductor nke Europe, ọ dị mkpa ka e mepụta ihe ọhụrụ dị mkpa, kamakwa a na-ebufe ha ngwa ngwa na ngwa ụlọ ọrụ mmepụta ihe na imepụta uru a na-agbanwe agbanwe," ka onye isi nchịkwa LZE bụ Dr Christian Forster kwuru. "Site na ahịa ya maka teknụzụ kachasị ọhụrụ, LZE GmbH na-enye ụlọ ọrụ na ụlọ ọrụ nyocha ohere pụrụ iche na nke mepere emepe n'ụwa niile na AlN substrates. N'ụzọ dị otu a, anyị na-enyere aka hụ na ngwa ndị na-ekwe nkwa maka ahịa ụlọ ọrụ mmepụta ihe dị elu na-abata n'ahịa ngwa ngwa."
Oge ozi: Julaị-20-2026